Liquid ring vacuum pumps are considered industry staples and are used for chucking during the wafer dicing process in the manufacture of semiconductors, a commodity indispensable to today’s information-reliant society. They are also used for deaeration of equipment used to produce pure water and ultrapure water, which are liquids used for cleaning semiconductor wafers and liquid crystals, where minute impurities are not permitted.
A general-purpose vacuum pump integrated with an electric motor. By eliminating the conventional coupling part, a significant reduction in size has been achieved. It can be incorporated into various devices.
An almighty vacuum pump that supports special corrosion resistant materials and mechanical seals. We have a wealth of experience as a vacuum source for production equipment used in the petrochemical industry and for pharmaceuticals.
Since it is a two-stage type with two impellers built in series in one pump, this vacuum pump can exhibit good performance even in a high vacuum range such as in distillation, concentration, and polymerization.
